Integrated controller solution for monitoring and controlling manufacturing equipment

ABSTRACT

Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of co-pending U.S. patent applicationSer. No. 13/895,978, filed May 16, 2013, which claims benefit of U.S.provisional patent application Ser. No. 61/657,407, filed Jun. 8, 2012.Each of the aforementioned related patent applications is hereinincorporated by reference which is herein incorporated by reference inits entirety.

FIELD

Embodiments of the present invention generally relate to control systemsused in manufacturing electronic devices.

BACKGROUND

Electronic device manufacturing facilities, or “fabs”, typically employprocess tools which perform manufacturing processes in the production ofelectronic devices. Such processes may include physical vapordeposition, chemical vapor deposition, etch, cleaning and otherelectronic device manufacturing processes. It should be understood thatthe present invention is not limited to any particular electronic devicemanufacturing process. A fab is typically laid out with a clean room onone floor, and a room containing auxiliary systems and devices whichsupport the clean room on a lower floor, herein referred to as a“sub-fab.” For ease of reference, the phrases ‘auxiliary systems’ and‘auxiliary devices’ may be used interchangeably herein to describe asub-fab system and/or device. One important function of the sub-fab isto abate toxic, flammable, or otherwise potentially harmful substanceswhich are common byproducts of electronic device manufacturingprocesses. The sub-fab may contain such auxiliary devices as abatementtools, AC power distributors, primary vacuum pumps, spare vacuum pumps,water pumps, chillers, heat exchangers, process cooling water suppliesand delivery systems, electrical power supplies and delivery systems,inert gas dumps, valves, device controllers, clean dry air supplies anddelivery systems, ambient air supplies and delivery systems, inert gassupplies and delivery systems, fuel supplies and delivery systems, touchscreens, process logic controllers, reagent supplies and deliverysystems, etc.

Controller systems used in electronic device manufacturing must utilizeoperating information, state information and other electronic signalsfrom process tools and sub-fab auxiliary systems to determine operatingparameters. However, if one or more of the fab or sub-fab systems arenot operating properly, or if information monitored by the integratedcontroller indicates a potential problem, unsafe operating conditionsmay result. For example, if pumps or abatement systems are notfunctioning properly, flow of toxic chemicals or global warming gasesout of the electronic device manufacturing facilities may be releasedinto the atmosphere without abatement. Other unsafe operating conditionsfrom one or more of the fab or sub-fab systems not operating properlymay include, for example, fire, equipment damage, etc.

Accordingly, the inventors have provided improved methods of monitoring,reporting and controlling process tools, gas flow controllers, andsub-fab auxiliary systems to facilitate safe and proper operation ofthis equipment.

SUMMARY

Methods and apparatus for controlling manufacturing equipment areprovided herein. In some embodiments, a manufacturing system may includean integrated controller having one or more inputs to receive inputvalues corresponding to operating information of at least one of aprocess tool, a mass flow controller or at least one sub-fab auxiliarysystem, wherein the integrated controller is configured to receive theinput values, determine that an error condition is matched based on thereceived input values, and control the at least one sub-fab auxiliarysystem to operate at a fail-safe operating mode responsive to thedetermined error condition.

In some embodiments, a method of controlling a manufacturing system mayinclude monitoring, by an integrated controller, operating informationof at least one of a process tool, a mass flow controller or at leastone sub-fab auxiliary system of the manufacturing system, determining,by the integrated controller, that an error condition is matched basedon the monitored operating information; and controlling, by theintegrated controller, the at least one sub-fab auxiliary system tooperate at a fail-safe operating mode responsive to the determined errorcondition.

Other and further embodiments and variations of the invention aredescribed in more detail, below.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention, briefly summarized above anddiscussed in greater detail below, can be understood by reference to theillustrative embodiments of the invention depicted in the appendeddrawings. It is to be noted, however, that the appended drawingsillustrate only typical embodiments of this invention and are thereforenot to be considered limiting of its scope, for the invention may admitto other equally effective embodiments.

FIG. 1 depicts a schematic view of a processing system having a controlsystem in accordance with some embodiments of the present invention.

FIG. 2 depicts a flow chart of a method 200 for determining whether anerror condition is matched in accordance with some embodiments of thepresent invention.

FIG. 3 depicts a flow chart of a second method 300 for determiningwhether an error condition is matched in accordance with someembodiments of the present invention.

FIG. 4 depicts a flow chart of a third method 400 for determiningwhether an error condition is matched in accordance with someembodiments of the present invention.

FIG. 5 depicts a flow chart of a fourth method 500 for determiningwhether an error condition is matched in accordance with someembodiments of the present invention.

FIG. 6 depicts a flow chart of other methods 600 for determining whetheran error condition is matched in accordance with some embodiments of thepresent invention.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. The figures are not drawn to scale and may be simplifiedfor clarity. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation.

DETAILED DESCRIPTION

Embodiments of the present invention relate to controls systems formonitoring and controlling “fab” systems and “sub-fab” auxiliary systemsused in the manufacture of electronic devices. Embodiments of thepresent invention provide an integrated control solution that utilizesprocess state and operating information from process tool sets, gaspanels, and sub components to ensure that the fab and sub-fab systemsare operating safely. For example, exemplary embodiments consistent withthe present invention provide smarter and safer operation of fab andsub-fab systems by assuring that various error conditions (e.g.,incorrect configuration information, loss of communication or power, theincorrect connection of signals to an integrated controller, and thelike) do not result in an unsafe operating condition. If an errorcondition is detected, exemplary control systems consistent with thepresent invention may control the sub-fab equipment to operate in afail-safe mode, show a warning lamp, display an error message, and/ordefer control back to the local sub-fab controllers. In some embodimentsconsistent with the present application, the fail-safe modes for sub-fabcomponents may include high capacity modes to accommodate the worst caseprocess demands (e.g., the highest effluent load demands) of the processtool on abatement systems and pumps.

Although embodiments herein describe an integrated controller, theintegrated controller may consist of multiple controllers which may becommunicatively coupled. In addition, in some embodiments, there may bemore than one control core per controller (i.e., one controller cancommunicate with multiple tools and sub-fab components.) Furthermore,although discussed in terms of “control” of fab and sub-fab components,in some embodiments consistent with the present application, “control”may consist of providing control signals to the “independentcontrollers” of the sub-fab components.

Finally, although embodiments herein describe controls systems formanufacturing systems used in the manufacture of electronic devices suchas substrate processing systems, embodiments of the present inventionmay be used in other industries where conservation of resources,reducing environmental impact of waste products, and error reporting ofmanufacturing equipment are of concern, such as for example, but notlimited to, the life science, food and agricultural industries.

FIG. 1 is a schematic depiction of a processing system 100 of anembodiment consistent with the present invention. Processing system 100may include a process tool controller 102 which may be linked to aprocess tool 104 through communication link 106. Process tool controller102 may be any microcomputer, microprocessor, logic circuit, acombination of hardware and software, or the like, suitable to controlthe operation of the process tool 104. For example, process toolcontroller 102 may be a PC, server tower, single board computer, and/ora compact PCI, etc. Process tool 104 may be any electronic devicemanufacturing process tool which requires effluent abatement and/orother resources from a sub-fab support system. Communication link 106(and any other communication link described herein) may be hardwired orwireless and may use any suitable communication protocol.

The process tool controller 102 may be linked to the integratedcontroller 108 by means of communication link 110. The integratedcontroller 108 may comprise a central processing unit (CPU) 142, amemory 144, a display 146, and support circuits 148 for the CPU. Thecontroller 108 may control each component of the processing system 100directly, or via computers (or controllers) associated with particularprocess chamber and/or support system components. The controller 108 maybe one of any form of general-purpose computer processor that can beused in an industrial setting for controlling various chambers andsub-processors. The memory, or computer-readable medium of the CPU maybe one or more of readily available memory such as random access memory(RAM), read only memory (ROM), floppy disk, hard disk, flash, or anyother form of digital storage, local or remote. The support circuits arecoupled to the CPU for supporting the processor in a conventionalmanner. These circuits include cache, power supplies, clock circuits,input/output circuitry and subsystems, and the like. Inventive methodsas described herein may be stored in the memory of the controller 108 assoftware routine that may be executed or invoked to control theoperation of the substrate processing system 100 in the manner describedherein. For example, each method step may be stored as or in a module ofthe memory 144. The software routine may also be stored and/or executedby additional CPUs (not shown) that are remotely located from thehardware being controlled by the controller 108.

The integrated controller 108 may be linked to one or more mass flowcontrollers (MFC) 138 through communication links 140. The MFC maycontrol a gas source 136 which provides gas to process tool 104. The MFCmay provide operating information either directly to the integratedcontroller through communications link 140, or indirectly through theprocess tool controller 102.

The integrated controller 108 may in turn be linked to sub-fab auxiliarysystems/devices 112, 114, 116 and 118 through communication links 120,122, 124 and 126, respectively. The sub-fab auxiliary systems/devicesmay each have a local controller (not shown) which communicates with theintegrated controller and controls the sub-fab auxiliarysystems/devices. Alternatively, the integrated controller 108 mayperform the functionality of a lower-level local controller for any orall of the sub-fab auxiliary systems/devices. Although four sub-fabauxiliary systems/devices are shown, it should be noted that more orfewer than four sub-fab auxiliary systems/devices may be linked to theintegrated controller 108. Sub-fab auxiliary systems/devices may includeabatement tools, AC power distributors, primary vacuum pumps, sparevacuum pumps, water pumps, chillers, heat exchangers, process coolingwater supplies and delivery systems, electrical power supplies anddelivery systems, inert gas dumps, valves, device controllers, clean dryair supplies and delivery systems, ambient air supplies and deliverysystems, inert gas supplies and delivery systems, fuel supplies anddelivery systems, touch screens, process logic controllers, reagentsupplies and delivery systems, etc.

In operation, process tool controller 102 may control the process tool104 by operating one or more of robots, doors, pumps, valves, plasmagenerators, power supplies, etc. As described above, process toolcontroller 102 may be constantly aware regarding the state of, andresource requirements of, each chamber in the process tool 104 and ofthe process tool 104 as a whole. Process tool controller 102 may haveaccess to a database (not shown) which the process tool controller 102may use to calculate the resource requirements of the chambers (notshown) and the process tool 104 as a whole. Process tool controller 102may send integrated controller 108 operating information regarding thestate of each chamber in the process tool 104 and of the process tool104 as a whole.

The integrated controller 108 may be linked to instruments in thesub-fab (not shown), calculate the resource requirements of the sub-fabauxiliary systems, and provide information regarding the resourcerequirements of the sub-fab auxiliary systems to the process toolcontroller 102.

The process tool controller 102 and MFC 138 may communicate processstate and operating information (which may include configurationinformation) to the integrated controller 108 which may in turn controlone or more sub-fab auxiliary systems 112, 114, 116 and 118 by operatingpumps, switches valves, power supplies, and/or other hardware throughcommunication links 119, 120, 122, 124 and 126. In the alternative,integrated controller 108 may direct sub-fab auxiliary system localcontrollers (not shown) to perform these functions. The integratedcontroller may obtain state and operating information (which may includeconfiguration information) from sub-fab auxiliary systems 112, 114, 116and 118. Examples of process state and operating information mayinclude, but are not limited to, electrical power use, fuel gas andpurge gas compositions, temperatures of processing environments, statusof data connections, and the like. The integrated controller 108 may usethe operating information obtain to ensure proper and safe operation ofthe processing system.

In some embodiments consistent with the present invention, theintegrated controller 108 is configured to receive input valuescorresponding to operating information of at least one of process tool104, mass flow controller 138 or at least one sub-fab auxiliary system112, 114, 116 and 118. The integrated controller 108 is furtherconfigured to determine whether an error condition is matched based onthe received input values. The integrated controller may be furtherconfigured to control the at least one sub-fab auxiliary system 112,114, 116 and 118 to operate at a fail-safe operating mode responsive toa determination that an error condition is matched.

In other embodiments consistent with the present invention a method ofcontrolling a substrate processing system may include monitoringoperating information of at least one of a process tool 104, a mass flowcontroller 138 or at least one sub-fab auxiliary system 112, 114, 116and 118, determining whether an error condition is matched based on themonitored operating information, and controlling at least one sub-fabauxiliary system to operate at a fail-safe operating mode responsive toa determination that an error condition is matched. In some embodiments,this method may be performed by the integrated controller 108.

FIG. 2 depicts a flow chart of a method 200 for controlling a processingsystem in accordance with some embodiments of the present invention. Insome embodiments, the method 200 may be an example of a module of thememory 144 of the integrated controller and may be used to control theprocessing system as described herein. The method 200 depicts a methodwhich may be performed by integrated controller 108 which may poll theprocess tool controller 102 and/or MFC 138 for MFC names in order todetermine any changes to MFC 138. MFC names, consistent with someembodiments described herein, may refer to gas names and additionalMFCs. When the name is not correct or an additional MFC is detected,there is a risk that somebody has changed the system physically and theold set-up could result in unsafe operating conditions. If changes toMFC 138 are detected, an error condition is matched and integratedcontroller 108 may signal at least one of the sub-fab auxiliary systems112, 114, 116 and 118 to operate at fail-safe operation mode until thenew MFC information can be physically verified and the system is reset.

Generally the method 200 begins at 202 where integrated controller 108may send a request for MFC names to at least one of process tool 104 orMFC 138. At 204 a response may be received responsive to the requestsent. Integrated controller 108 may determine whether there are anychanges to MFC 138 based on the response received at 206. If there areno changes, the method terminates. If integrated controller 108determines that there are changes to MFC 138 (i.e., an error conditionis matched), integrated controller 108 signals one or more of sub-fabauxiliary systems 112, 114, 116 and 118 to operate at fail-safeoperation mode at 208. Additionally, integrated controller 108 maydisplay a warning light and an error message at 210 and 212.Alternatively, integrated controller 108 may signal one or more of theprocess tool controller 102, MFC 138, or sub-fab auxiliary systems 112,114, 116 and 118 to display a warning light and an error message.

FIG. 3 depicts a flow chart of a method 300 for controlling a processingsystem in accordance with some embodiments of the present invention. Insome embodiments, the method 300 may be an example of a module of thememory 144 of the integrated controller and may be used to control theprocessing system as described herein. The method 300 depicts a methodwhich may be performed by integrated controller 108.

Generally the method 300 begins at 302 where integrated controller 108may receive an input signal from process tools, MFCs, or sub-fabauxiliary systems. Integrated controller 108 may determine if thereceived input signal is accompanied by a label at 304. For example, insome embodiments, the input signals may include specific informationsent by process tool 104 or process tool controller 102 to integratedcontroller 108 such as status variable ID (SVID) information andcollected event ID (CEID) information. SVID and CEID information mayinclude, for example, gas names and flows, chamber status, recipe andlot start/stop information, and the like. If the received input signalis accompanied by a label identifying the source of the information, themethod terminates. If integrated controller 108 determines the receivedinput signal is not accompanied by a label (i.e., an error condition ismatched), integrated controller 108 signals one or more of sub-fabauxiliary systems 112, 114, 116 and 118 to operate at fail-safeoperation mode at 306. Additionally, integrated controller 108 maydisplay a warning light and an error message at 308 and 310.Alternatively, integrated controller 108 may signal one or more of theprocess tool controller 102, MFC 138, or sub-fab auxiliary systems 112,114, 116 and 118 to display a warning light and an error message.

FIG. 4 depicts a flow chart of a method 400 for controlling a processingsystem in accordance with some embodiments of the present invention. Insome embodiments, the method 400 may be an example of a module of thememory 144 of the integrated controller and may be used to control theprocessing system as described herein. The method 400 depicts a methodwhich may be performed by integrated controller 108.

Generally the method 400 begins at 402 where integrated controller 108may receive a label from process tools, MFCs, or other sub-fab auxiliarysystems. Integrated controller 108 may determine if the received labelis accompanied by an associated input signal at 404. A label mayidentify the source of the information (e.g., process tool, MFC, sub-fabauxiliary system). The input signals may include specific informationsent by process tool 104 or process tool controller 102 to integratedcontroller 108 such as status variable ID (SVID) information andcollected event ID (CEID) information. SVID and CEID information mayinclude, for example, gas names and flows, chamber status, recipe andlot start/stop information, etc. If the received label is accompanied byan associated input signal, the method terminates. If integratedcontroller 108 determines the received label is not accompanied by aninput signal (i.e., an error condition is matched), integratedcontroller 108 signals one or more of sub-fab auxiliary systems 112,114, 116 and 118 to operate at fail-safe operation mode at 406.Additionally, integrated controller 108 may display a warning light andan error message at 408 and 410. Alternatively, integrated controller108 may signal one or more of the process tool controller 102, MFC 138,or sub-fab auxiliary systems 112, 114, 116 and 118 to display a warninglight and an error message.

FIG. 5 depicts a flow chart of a method 500 for controlling a processingsystem in accordance with some embodiments of the present invention. Insome embodiments, the method 500 may be an example of a module of thememory 144 of the integrated controller and may be used to control theprocessing system as described herein. The method 500 depicts a methodwhich may be performed by integrated controller 108.

Generally method 500 begins at 502 where integrated controller 108 maymonitor the communication connection between integrated controller 108and process tool 102, MFC 138, and sub-fab auxiliary systems 112, 114,116 and 118. At 504, integrated controller 108 may determine if any oneor more of a number of error conditions are matched. Specifically, errorconditions may include:

-   -   a) integrated controller 108 determines that communication of        any of the data streams is lost between integrated controller        108 and process tool 104, MFC 138, and sub-fab auxiliary systems        112, 114, 116 and 118 at 506;    -   b) integrated controller 108 determines that process tool 104,        MFC 138, or sub-fab auxiliary systems 112, 114, 116 and 118        loses power at 508;    -   c) integrated controller 108 determines that process tool 104,        MFC 138, or sub-fab auxiliary systems 112, 114, 116 and 118        performs an emergency machine off (“EMO”) procedure at 510;    -   d) a shutdown procedure is initiated by integrated controller        108 at 512; or    -   e) integrated controller 108 determines that a monitored digital        heartbeat is not available at 514. A digital heartbeat may        include an electrical signal sent at discreet intervals by a fab        or sub-fab system which indicates that the fab or sub-fab system        is powered and functioning. In some embodiments, the signal may        be generated and sent by integrated controller 108 with an ACK        signal returned by the fab or sub-fab system.

If any of the aforementioned error conditions occur, integratedcontroller 108 signals one or more of sub-fab auxiliary systems 112,114, 116 and 118 to operate at fail-safe operation mode at 516.Additionally, integrated controller 108 may display a warning light andan error message at 518 and 520. Alternatively or in combination,integrated controller 108 may signal one or more of the process toolcontroller 102, MFC 138, or sub-fab auxiliary systems 112, 114, 116 and118 to display a warning light and an error message.

In embodiments consistent with FIG. 5, if integrated controller 108determines that process tool 104, MFC 138, or sub-fab auxiliary systems112, 114, 116 and 118 loses power or performs an EMO procedure,additional processing may be performed in 522. Specifically, when aprocess is running and is abruptly shut down, gas may be trapped in theprocess tool gas chamber, pumps, and lines. When the process isrestarted, abatement systems might not know gas was flowing and stillremains in the system, and would remain in idle mode. However,embodiments consistent with the present invention may retain theknowledge that gas was flowing prior to the last process interrupt andthe abatement would start up in low fuel mode for a set period of timeinstead of starting up in pump run mode. This would assure that the gasfrom the process tool chamber, pump, and gas lines was abated. Knowledgethat gas was flowing prior to the last process interrupt may be retainedvia an indicator stored in memory 144.

FIG. 6 depicts a flow chart of a method 600 for controlling a processingsystem in accordance with some embodiments of the present invention. Insome embodiments, the method 600 may be an example of a module of thememory 144 of the integrated controller and may be used to control theprocessing system as described herein. The method 600 depicts a methodwhich may be performed by integrated controller 108.

Generally method 600 begins at 602 where integrated controller 108 mayreceive gas flow and/or gas composition information from at least one ofthe process tool controller 102 or MFC 138. Integrated controller 108may determine if the received gas flow and/or gas compositioninformation matches previously stored gas flow and/or gas compositioninformation at 604. The gas flow and/or gas composition information maybe stored in data structures in integrated controller memory 144 or insub-fab auxiliary system memory (now shown). If the received gas flowand/or gas composition information matches stored gas flow and/or gascomposition information, the method terminates. If integrated controller108 determines that the received gas flow and/or gas compositioninformation does not match stored gas flow and/or gas compositioninformation (i.e., an error condition is matched), integrated controller108 signals one or more of sub-fab auxiliary systems 112, 114, 116 and118 to operate at fail-safe operation mode at 606. Additionally,integrated controller 108 may display a warning light and an errormessage at 608 and 610. Alternatively, integrated controller 108 maysignal one or more of the process tool controller 102, MFC 138, orsub-fab auxiliary systems 112, 114, 116 and 118 to display a warninglight and an error message.

In each of the embodiments described above, in addition to warninglights and error messages, integrated controller 108 can producestandard reports including statistical analysis, details of the errorconditions matched, change in process capability based on the errorconditions matched, and/or confidence level of failure or risk of notperforming the recommended preventative maintenance activities (i.e.,not operating in fail-safe mode).

While the foregoing is directed to embodiments of the present invention,other and further embodiments of the invention may be devised withoutdeparting from the basic scope thereof.

1. An integrated controller of a manufacturing system, comprising: oneor more inputs to receive input values corresponding to operatinginformation of at least one of a process tool, a mass flow controller orat least one sub-fab auxiliary system, wherein the integrated controlleris configured to: monitor operating information of at least one of aprocess tool, a mass flow controller (MFC) or at least one sub-fabauxiliary system of the manufacturing system; determine that an errorcondition is matched based on the monitored operating information,wherein determining that an error condition is matched based on themonitored operating information includes: receiving an input signal fromat least one of the process tool controller, the mass flow controller orthe at least one sub-fab auxiliary system, wherein the input signalincludes information regarding at least one of gas names, gas flows,chamber status, process recipe, or lot start/stop information;determining that the received input signal is not accompanied by anassociated label of the process tool, the mass flow controller or the atleast one sub-fab auxiliary system that sent the input signal, whereinthe label identifies a source of the input signal; and determining thatthe error condition is matched; and control the at least one sub-fabauxiliary system to operate at a fail-safe operating mode responsive tothe determined error condition.
 2. The integrated controller of claim 1,wherein at least one of the at least one sub-fab auxiliary system is anabatement system.
 3. The integrated controller of claim 2, wherein theabatement system has a local abatement controller which controls theabatement system, and wherein controlling the at least one sub-fabauxiliary system to operate at the fail-safe operating mode includessignaling the local abatement controller to operate at the fail-safeoperating mode.
 4. The integrated controller of claim 2, wherein thefail-safe operating mode of the abatement system includes operating theabatement system in a high energy mode which can accommodate a maximumprocess demand of the process tool on the abatement system.
 5. Theintegrated controller of claim 1, wherein at least one of the at leastone sub-fab auxiliary system is a pump.
 6. The integrated controller ofclaim 5, wherein the pump has a local pump controller which controls thepump, and wherein controlling the at least one of the at least onesub-fab auxiliary system to operate at a fail-safe operating modeincludes signalling the local pump controller to operate at a fail-safeoperating mode.
 7. The integrated controller of claim 5, wherein thefail-safe operating mode of the pump includes operating the pump in ahigh speed mode which can accommodate a maximum process demand of theprocess tool on the pump.
 8. A method of controlling a manufacturingsystem, comprising: (a) receiving input values by an integratedcontroller having one or more inputs, wherein the input valuescorrespond to operating information of at least one of a process tool, amass flow controller or at least one sub-fab auxiliary system, andwherein each input value includes information regarding at least one ofgas names, gas flows, chamber status, process recipe, or lot start/stopinformation; (b) determining that an error condition is matched based onthe received input values when the input value is received without anassociated label of the process tool, the mass flow controller or the atleast one sub-fab auxiliary system, wherein the label identifies asource of the input value; and (c) controlling at least one sub-fabauxiliary system to operate at a high energy operating mode responsiveto the determined error condition.
 9. The method of claim 8, wherein theintegrated controller is communicatively coupled to: a process toolcontroller linked to the process tool, wherein the process toolcontroller is adapted to control the process tool; the mass flowcontroller, wherein the mass flow controller is linked to a gas source,the gas source being coupled to the process tool to provide one or moregasses to the process tool, wherein the one or more gasses provided tothe process tool by the gas source are controlled by the mass flowcontroller; and the at least one sub-fab auxiliary system.
 10. Themethod of claim 8, wherein at least one of the at least one sub-fabauxiliary system is an abatement system.
 11. The method of claim 10,wherein the abatement system has a local abatement controller whichcontrols the abatement system, and wherein controlling the at least onesub-fab auxiliary system to operate at the high energy operating modeincludes signaling the local abatement controller to operate at the highenergy operating mode.
 12. The method of claim 10, wherein the highenergy operating mode can accommodate a maximum process demand of theprocess tool on the abatement system.
 13. The method of claim 8, whereinat least one of the at least one sub-fab auxiliary system is a pump. 14.The method of claim 13, wherein the pump has a local pump controllerwhich controls the pump, and wherein controlling the at least one of theat least one sub-fab auxiliary system to operate at the high energyoperating mode includes signalling the local pump controller to operateat the high energy operating mode.
 15. A non-transitory computerreadable medium for storing computer instructions that, when executed byat least one processor causes the at least one processor to perform amethod of controlling a manufacturing system, the method comprising: (a)receiving input values by an integrated controller having one or moreinputs, wherein the input values correspond to operating information ofat least one of a process tool, a mass flow controller or at least onesub-fab auxiliary system, and wherein each input value includesinformation regarding at least one of gas names, gas flows, chamberstatus, process recipe, or lot start/stop information; (b) determiningthat an error condition is matched based on the received input valueswhen the input value is received without an associated label of theprocess tool, the mass flow controller or the at least one sub-fabauxiliary system, wherein the label identifies a source of the inputvalue; and (c) controlling at least one sub-fab auxiliary system tooperate at a high energy operating mode responsive to the determinederror condition.
 16. The non-transitory computer readable medium ofclaim 15, wherein the integrated controller is communicatively coupledto: a process tool controller linked to the process tool, wherein theprocess tool controller is adapted to control the process tool; the massflow controller, wherein the mass flow controller is linked to a gassource, the gas source being coupled to the process tool to provide oneor more gasses to the process tool, wherein the one or more gassesprovided to the process tool by the gas source are controlled by themass flow controller; and the at least one sub-fab auxiliary system. 17.The non-transitory computer readable medium of claim 15, wherein atleast one of the at least one sub-fab auxiliary system is an abatementsystem.
 18. The non-transitory computer readable medium of claim 17,wherein the abatement system has a local abatement controller whichcontrols the abatement system, and wherein controlling the at least onesub-fab auxiliary system to operate at the high energy operating modeincludes signaling the local abatement controller to operate at the highenergy operating mode.
 19. The non-transitory computer readable mediumof claim 17, wherein the high energy operating mode can accommodate amaximum process demand of the process tool on the abatement system. 20.The non-transitory computer readable medium of claim 15, wherein atleast one of the at least one sub-fab auxiliary system is a pump.